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hgis grids gas Decomposition Siemens

Numerical Analysis of the Chemical Vapor Deposition of ...· The polysilicon CVD reactor, also called Siemens reactor, is comprised of an airtight chamber where some silicon rods are heated by the electric current. Polysilicon is deposited on the silicon rods through the thermal decomposition in a trichlorosilane and hydrogen system [2]. * Corresponding author. Tel.: (86)29-82668789; fax: (86)29-82668789.

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